Advanced SPC Techniques for Process Yield Improvement

Zigmund Bluvband, Ph.D., ALD Ltd., Israel
P. Grabov, QA&R, ALD Ltd., Israel


Procedures and tools of statistical process control (SPC) can increase product yield in the semiconductor industry. However, conventional SPC techniques do not fit the unique processes of the semiconductor industry.
ALD has developed a customized, advanced SPC methodology for wafer fabrication process control, and has successfully implemented it in several fab areas. The scope of the methodology includes data collection and treatment as well as analysis interpretation, and decision making. The concept focuses on data variability as a basis for analysis of a process's current performance.